Main Equipment
Post process equipment
SBB/GBB ROOM
- Size : 8000 × 8000 × 8000
- Pressure : 2.0kgf~7.5kgf
SBB/GBB ROOM
- Size : 8000 × 8000 × 8000
- Pressure : 2.0kgf~7.5kgf
Electrolyzerand neutralizer
- Size : 6000 × 8000 × 5000 / 각
- Volume : 192,000ℓ / 각
Rectifier
- Volume : 12V × 10,000A × 3
Water distiller
- Volume : 18MΩ·cm
Curing oven1
- Size : 6000 × 8000 × 6150
- Temperature : 100°C
Curing oven2
- Size : 8000 × 8000 × 6000
- Temperature : 200°C
Precision cleaning room
IC analyzer (ECO IC)
1